SFC5500-50SCCM

SFC5500-50SCCM is a digital mass flow controller. The heart of the SFC5500 product is the unsurpassed Sensirion CMOSens® technology. It combines a high precision sensor element with state-of-the-art signal processing on a single chip and thereby provides an accurately calibrated and temperature compensated signal. It achieves unmatched ratings for speed, accuracy and repeatability at a very attractive system cost. Due to the excellent long-term stability of CMOSens® chips, no recalibration is required. The brilliant performance of the SFC5500 product makes it the best choice for a wide range of applications, such as analytical instrumentation, coating/etching equipment, medical equipment, process automation and gas mixing, to name a few.

• 50 – 0.05sccm flow range
• Excellent accuracy and repeatability, very wide control and measurement range
• G ¼″ flange compatible with a broad range of connectors: e.g. Swagelok, Legris, Festo
• Calibrated for multiple gases (Air, N2, O2, H2, He, CH4, N2O, Ar, CO2)
• Digital interface with temperature-compensated output
• Mean Time Between Failures (MTBF) 169 years
• No drift and no re-calibration required in the field, NIST-traceable calibration
• Pressure resistance up to 10bar
• Supply voltage range (VDD) from 14.0 – 26.4V DC
• Ultra-fast settling time (<100ms)