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Mass Flow Controller, 0.002 l/min, 2 l/min, 10 bar, 14 V, 26.4 V, G1/4


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Technical Datasheet:
SFC5500-2SLM   Datasheet
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Product Range Selector (CMOSens SFC5500 Series)

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Product Overview

SFC5500 series versatile mass flow controller represent the culmination of Sensirion’s excellent 20-year track record in precision control of gas flow. The sensor is based on microthermal measurement principle and makes use of Sensirion’s proven CMOSens® MEMS technology. This allowed us to build a radical mass flow controller/meter with best-in-class performance and excellent reliability, which unlike most other devices on market, does not drift and does not require in-service re-calibration. Thanks to exceptionally high control range enabled by CMOSens® MEMS flow sensor, SFC5500 series can cover multiple flow ranges of a traditional mass flow controller/meter in a single device. Coupled with multi-gas calibration and exchangeable fittings, this series is first mass flow controller on market available as standard off-the-shelf products suitable for applications in medical, analytical and industrial sectors, bioreactors, chemical, plastics and glass industry, semiconductors.
  • Flow rates up to 2000sccm/2slm
  • Suitable for applications where best accuracy, highest speed and widest dynamic range are needed
  • Excellent accuracy and repeatability (0.8% / 0.1% of setpoint respectively)
  • Very wide control range (0.1% - 100% full scale), ultra-fast settling time (100ms)
  • G ¼″ flange compatible with a broad range of connectors: e.g. Swagelok, Legris, Festo
  • Calibrated for multiple gases (Air, N2, O2, H2, He, CH4, N2O, Ar, CO2)
  • Digital interface with temperature-compensated output, ultra-fast settling time (100ms)
  • Pressure resistance up to 10 bar, mean time between failures (MTBF) 169 years
  • No drift and no re-calibration required in the field, NIST-traceable calibration
  • EK-F5x evaluation kit for quick and easy testing

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CMOSens SFC5500 Series

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Technical Documents (7)

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